http://ir-heat-corp.com/zh/tags/%E5%BE%AE%E6%9C%BA%E7%94%B5%E7%B3%BB%E7%BB%9F/ Recent content in 微机电系统 on Professional IR Heating Solutions Hugo zh Thu, 30 Jul 2026 11:49:00 +0800 http://ir-heat-corp.com/zh/posts/engineering-zero-contamination-heating-for-mems-wafer-drying-using-high-purity-quartz-ir-lamps/ Thu, 30 Jul 2026 11:49:00 +0800 http://ir-heat-corp.com/zh/posts/engineering-zero-contamination-heating-for-mems-wafer-drying-using-high-purity-quartz-ir-lamps/ <p><img src="http://ir-heat-corp.com/images/594cd14ba0fdce93f512a6ddf4ebf45d.png" alt="MEMS传感器晶圆干燥加热器"></p> <h2 id="如何正确干燥晶圆避免灰尘问题">如何正确干燥晶圆（避免灰尘问题）</h2> <p>如果你从事过MEMS传感器的制造工作，那么你一定知道那种糟糕的情况：哪怕有一粒微小的灰尘落在晶圆上，整批晶圆都会报废。这真是令人沮丧。通常，造成这种问题的罪魁祸首就是加热元件本身。那些旧式的金属外壳加热器在需要保持清洁的时候很容易出现碎屑或释放气体。</p>